In–N Codoped P-Type ZnMgO Thin Films with Bandgap Engineering

L. Gong,Z. Z. Ye,J. G. Lu
DOI: https://doi.org/10.1016/j.vacuum.2010.07.009
IF: 4
2010-01-01
Vacuum
Abstract:In–N codoped p-type ZnMgO films have been prepared by direct current reactive magnetron sputtering. The effect of Mg content on the properties of In–N codoped ZnMgO films was examined. The Mg content in the film is directly proportional to that in the target suggesting the same sputtering mechanism of Zn and Mg. The p-type behaviour of ZnMgO films was deteriorated with the Mg content increasing. The bandgap engineering, due to the fact of Mg substituting Zn, was realized in p-type ZnMgO films.
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