Abstract:Ba0.6Sr0.4TiO3 (BST) films were deposited on Pt/SiO2/Si substrates by radio frequency magnetron sputtering. The deposited films were crystallized by conventional thermal annealing (CTA) and rapid thermal annealing (RTA). The interfacial structures of BST/Pt were studied. High-resolution transmission electron microscopy (HRTEM) observation shows that there is a transition layer at BST/Pt interface, and the layer is 4–5nm thick for CTA and 2–3nm for RTA. X-ray photoelectron spectroscopy (XPS) investigations show that the layer is composed of perovskited BST phase and non-perovskited BST phase. The content of the non-perovskited BST phase is most for CTA, whereas that of the perovskited BST phase is most for RTA. It is found that the transition layer thickens with the increase of annealing temperature, and CTA corresponds to faster thickening rate. XPS shows that the non-perovskited BST phase does not come from the absorbed CO2 or CO contaminations, but from other interfacial elements. Also, it is indicated that the RTA-annealed BST film capacitor shows much better dielectric properties, with an average value of 150 higher dielectric constant and almost two orders of magnitude lower leakage current density than the CTA-annealed film capacitor. Grazing X-ray diffraction (GXRD) patterns exhibit that the RTA-annealed BST films present more compact structure. It is such a compact structure that can effectively prevent the absorbed elements further diffusing toward two sides, and cause thinner transition layer, thus result in higher dielectric constant and lower leakage current density.

Preparation, Microstructure and Dielectric Properties of Ba0.5Sr0.5TiO3 Thin Films Grown on Pt/Ti/SiO2/Si Substrates by Pulsed Laser Deposition

Study on Compositionally Graded Epitaxial Barium Strontium Titanate Thin Films Derived from Pulsed Laser Deposition

Enhanced Piezoresponse and Dielectric Properties for Ba1-XSrXTiO3 Composition Ultrathin Films by the High-Throughput Method

Evaluating the impact of substrate deposition on optical properties of perovskite barium strontium titanate (Ba0.5Sr0.5TiO3) thin films prepared by pulsed laser deposition technique

Dielectric Characteristics of Ba_(0.65)Sr_(0.35)TiO_3 Thin Films by Sol-Gel Method

The interfacial characteristics of Ba0.6Sr0.4TiO 3 films deposited by radio frequency magnetron sputtering

Dielectric Properties of (ba0.5sr0.5)tio3 Thin Films

The Interfacial Characteristics of Ba0.6Sr0.4TiO3 Films Deposited by Radio Frequency Magnetron Sputtering

Sol-Gel Preparation and Characterization of Ba0.65sr0.35(Ti0.95sn0.05)O-3 Thin Films

Effects of deposition conditions on the dielectric non-linearity of Ba 0.6Sr0.4TiO3 thin films

Microstructures and Dielectric Properties of Compositionally Graded (ba 1-X Sr X ) TiO 3 Thin Films Prepared by Pulsed Laser Deposition

Microstructure and Enhanced In-Plane Ferroelectricity of Ba0.7sr0.3tio3 Thin Films Grown on Mgal2o4 (001) Single-Crystal Substrate

Preparation and characterization of crystalline Ba0.5Sr0.5TiO3 thin films on FTO transparent electrodes

Design, Preparation and Dielectric Properties of Excellent Yttrium-Doped Ba0.6Sr0.4TiO3 Films

The Interfacial Structures of (ba, Sr)Tio3 Films Deposited by Radio Frequency Magnetron Sputtering

High tunabilty Ba 0.6 Sr 0.4 TiO 3 thin films fabricated on Pt–Si substrates with La 0.5 Sr 0.5 CoO 3 buffer layer

Microstructural and Morphological Evolutions in Compositionally-Graded (ba 1−x Sr X )tio 3 Thin Films and Related Dielectric Properties

The influence of post-annealing on the chemical structures and dielectric properties of the surface layer of Ba<sub>0.6</sub>Sr<sub>0.4</sub>TiO<sub>3</sub> films

Preparation and Dielectric Properties of BST Films Deposited on Ti5Si3 Electrode Layer

Characteristics of Ba0.8sr0.2tio3 Ferroelectric Thin Films by Rf Magnetron Sputtering

Structural and Optical Properties of BaxSr1−xTiO3 Thin Films on Indium Tin Oxide/quartz Substrates Prepared by Radio-Frequency Magnetron Sputtering