Influence of Halo Implantations on the Total Ionizing Dose Response of 28 nm pMOSFETs Irradiated to Ultra-High Doses
Stefano Bonaldo,S. Mattiazzo,Christian Enz,A. Baschirotto,Alessandro Paccagnella,Xiaoming Jin,Simone Gerardin
DOI: https://doi.org/10.1109/tns.2018.2876943
IF: 1.703
2018-01-01
IEEE Transactions on Nuclear Science
Abstract:In this paper, the total ionizing dose (TID) response of a commercial 28-nm high-k CMOS technology at ultrahigh doses is measured and discussed. The degradation of pMOSFETs depends not only on the channel width but also on the channel length. Short-channel pMOSFETs exhibit a higher TID tolerance compared to long ones. We attributed this effect to the presence of the halo implantations. For short-channel lengths, the drain halo can overlap the source one, increasing the average bulk doping along the channel. The higher bulk doping attenuates the radiation-induced degradation, improving the TID tolerance of short-channel transistors. The results are finally compared and discussed through technology computer-aided design simulations.