Analysis and Optimization of Sub-100 Nm NMOS with Halo

WANG Yang,WANG Bingbing,HUANG Ru,ZHANG Xing
DOI: https://doi.org/10.3969/j.issn.1000-3819.2006.04.005
2006-01-01
Abstract:The Short-channel effect (SCE) is one of the key challenges we have to deal with when the feature size of the MOS devices is scaling down into the sub-100 nm regime. The Halo structure device can restrain the SCE effectively, and improve the device performance greatly with good doping distribution in the Halo region. In this paper, influence of Halo process parameter on device performance is researched and optimized with ISE-TCAD tools. It is found that higher tilt angle, energy and dosage gives increased threshold voltage and radio of I_ on to I_ off ,and also reduced leakage current and threshold shift, but reduced drive current which means that it is not a simple linear relation between implantation parameters and device performance and an optimized result is needed to get according to the requirements.
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