Mechanical and Tribological Properties of Ta-Cr-N Films with Different Cr Contents Deposited by Reactive Magnetron Sputtering

Liu Xing,Ma Guojia,Zhang Lin,Sun Gang,Duan Yuping,Liu Shunhua

2012-01-01

Rare Metal Materials and Engineering

Abstract:Ta-Cr-N films with various Cr contents were fabricated by reactive magnetron sputtering from the co-deposition of Cr and Ta targets in the presence of the reactive gas mixture. The chemical structure, mechanical and tribological properties of Ta-Cr-N films with various Cr contents were investigated. X-ray diffraction (XRD), scanning electron spectroscopy (SEM), energy dispersive spectroscopy (EDS), nano-indentation, ball-on-disc tribometer and scratch tester have been used to characterize the microstructure and mechanical properties. The addition of Cr into TaN films causes decrease of lattice parameters and variation of the grain sizes of films. When Cr contents increase, the hardness, adhesion, and wear resistance are improved. And the Ta-Cr-N film with 29.5% Cr content shows the highest hardness, the lowest grain size and wear rate.