Study on Noise Mechanism of MEMS Accelerometer for Petroleum Exploration

WANG Jun-jie,CHE Lu-feng,WU Hao,WANG Yue-lin
DOI: https://doi.org/10.3969/j.issn.1000-9787.2007.01.014
2007-01-01
Abstract:For the sake of petroleum exploration the noise source of MEMS accelerometer and its detection circuit is analyze.The noise of different circuits forms is compared.Some measures are taken to improve the properties of MEMS accelerometer.Its resolution is from formal 0.01 m/s~2 to latter 0.001 m/s~2 resulting from vibrating test.
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