Abstract:Grating-assisted optical interferometry is advantageous for high integration and electromagnetic immunity and thus powerful for developing microscale accelerometers with high sensitivity. However, the optical intensity of interferometric signal is normally sinusoidal with respect to the phase difference, resulting in imperfect linearity and limited dynamic range. To combat this and enhance the utility of interferometry in seismic applications, a digital closed-loop detection system with electromagnetic force feedback is first equipped for interferometric micro-electromechanical system (MEMS) accelerometers with a resonance below 10 Hz. We validate the control scheme upon system-level simulations and then perform experimental evaluations on an 8.35-Hz high-sensitivity accelerometer prototype. Test results demonstrate that the feedback control improves the dynamic range by 23 times, from 30 to 697 mu g; meanwhile, an excellent R-2 of 0.99995 is achieved in the scale factor, indicating a great linearity in output. More importantly, the 0.2-Hz terrestrial microseism was successfully detected by the closed-loop device, further demonstrating a noise floor of 10 ng/root Hz from 0.2 to 7 Hz under calibration of a standard seismometer. This control system not only enables nonlinear correction of our accelerometers but also offers a low-noise solution for inherent narrow dynamic range in most low-frequency interferometric transducers.

Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

Noise Analysis and Parameter Optimization of Digital MEMS Accelerometer System

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Optical Design and Analysis of a High Resolution MOEMS Accelerometer Based on Diffraction Grating

The Analysis of Temperature Effect and Temperature Compensation of Moems Accelerometer Based on A Grating Interferometric Cavity

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure.

Analysis and Amelioration about the Cross-Sensitivity of A High Resolution Moems Accelerometer Based on Diffraction Grating

The Modulation and Demodulation Module of a High Resolution MOEMS Accelerometer

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

A MEMS Based Fabry–Pérot Accelerometer with High Resolution

An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement

A Seismic-Grade Optical MEMS Accelerometer with Force Feedback Control

2.4 Ng/√hz Low-Noise Fiber-Optic MEMS Seismic Accelerometer.

An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz<sup>1/2</sup>

Design and Demonstration of an Electromagnetic Force-Rebalanced Sub-10-Hz Interferometric MEMS Accelerometer

Optical Interferometric MEMS Accelerometers

Nano-g Optical Accelerometer with a Large Dynamic Range and Low Noise Floor

High Sensitivity Optical MEMS Accelerometer Based on a Metal Fabry–Pérot Microcavities Wavelength Modulation System