Abstract:As actuator of the force-rebalanced servo loop, the electrostatic force generator of the micro-accelerometer shows high nonlinearity while the interpole of the micro-electro-mechanical system(MEMS) sensor is far away from its balance position. The control system cannot rebalance itself with the limited bandwidth after an external long overload, because the characteristics of the force generator differ from normal case. Although for similar problems, solutions with cascading lead-lag blocks, with the anti-windup(AW) technology, or with the sliding-mode control, are widely reported, the problems such as performance loss or difficulty to synthesize a digital controller still remain. Based on existing researches, remedies are developed by analyzing the characteristic of the system not only near the balance position, but also corresponding to the whole moveable range of the interpole, and a new controller is proposed. The solution is compared with the common solutions of cascading lead-lag blocks method, AW methods, and sliding mode methods. Comparison results show that the proposed solution avoid performance loss, compared to cascading lead-lag blocks solution; the proposed solution is easily synthesized and implemented in the analog servo loop of the micro-accelerometer, compared to digital AW methods; at the same time, the proposed solution avoids suffering the chattering effect problem but just utilize it, compared to the sliding-mode control solution. Nevertheless, comparison results show the solution is lack of commonality, since the solution is only more suitable to micro electrostatic force-rebalance system. The SIMULINK models with and without the proposed solution, taking typical micro-accelerometer parameters, have been set up for simulation; corresponding experiments utilizing electrometric method are also conducted after the successful simulations. Simulation and experiment results verify that the micro-accelerometer will reliably return to normal operation after external long overload with the proposed solution. Therefore, it is expected to design the analog servo loop of high performance micro electrostatic force-rebalance system so as to ensure the rebalance after long overload without performance loss.

Noise Analysis and In Situ Detection of the Electromagnetic Servo Actuator for a Nano-g Accelerometer With a Large Dynamic Range

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

Electromechanical co-simulation analysis for contactless positioning and vibration isolation platform

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Micromachined Accelerometers with Sub-g/Hz Noise Floor: A Review

A Nano-g Electromagnetic Accelerometer with 152-Db Wide Dynamic Range

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Modeling and Noise Analysis of a Fence Structure Micromachined Capacitive Accelerometer System

Noise Investigation of an Electrostatic Accelerometer by a High-Voltage Levitation Method Combined with a Translation-Tilt Compensation Pendulum Bench

Analysis and Prevention for Oscillation Failure of Capacitive Micro-Accelerometers

Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer

A force balance micromachined accelerometer with a self-noise of 1 ng/Hz1/2

Micromachined Accelerometers with Sub-μg/√Hz Noise Floor: A Review

Nano-g Micro-Optics Accelerometer With Force Feedback Control and Improved Dynamic Range

A Sensitive Micromachined Resonant Accelerometer for Moving-Base Gravimetry

Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer

Noise Analysis and Performance Improvement of a MEMS Fabry-Pérot Seismic Accelerometer

Design and Test of a Micromachined Resonant Accelerometer with High Scale Factor and Low Noise

Sub-micro-g Resolution Test of Accelerometers Based on Tilt Dynamic Modulation in Gravity Field

Calibrating Nonlinearity Coefficients of a Nano-G Accelerometer by Dual-Frequency Excitation on a Shaker