Abstract:The electromechanical co-simulation method was used to simulate and analyze the 6-DOF (degrees of freedom) positioning and micro-vibration isolation functions of the platform in order to analyze the working performances of a contactless positioning and vibration isolation platform which works at space microgravity environment. The working principle of the contactless positioning and vibration isolation platform was introduced. The exciting unit, position measuring unit and acceleration measuring unit of the platform were made up by contactless biaxial actuators, biaxial position sensitive detectors and uniaxial accelerometers according to space symmetry layout scheme. The controller of the platform was designed based on position and acceleration feedback. Then the mechanical system simulation model and the closed-loop control system simulation model based on position and acceleration feedback was established by ADAMS and MATLAB/Simulink, respectively, which together set up the electromechanical co-simulation model of the platform. The positioning and vibration isolation performances of the platform were simulated by the co-simulation model. Results show that the 6-DOF displacement and angular displacement control errors of the platform are less than 10 μm and 2×10−5 rad respectively under small range positioning mode. The suppression efficiencies of the platform for 6-DOF direct sinusoidal disturbances with frequency range of 0.01−1 Hz and 1−100 Hz are 39−73 dB and 19−73 dB, respectively. The relative displacements between the floater and the stator are less than 1 mm during vibration isolation control process under vibration isolation mode.

Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma-Delta MEMS Capacitive Accelerometers

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

Electromechanical co-simulation analysis for contactless positioning and vibration isolation platform

A New Modeling Method of MEMS System's Noise

A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model

Investigation of a Complete Squeeze-Film Damping Model for MEMS Devices

Modeling and Noise Analysis of a Fence Structure Micromachined Capacitive Accelerometer System

Noise Behaviors of a Closed-Loop Micro-Electromechanical System Capacitive Accelerometer

Modeling and Simulation of Micromachined Gyroscope

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation

Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor

Modeling of Capacitive Microaccelerometers with Squeeze Film Damping and Electrostatic Effects Using Model Order Reduction

Design and Demonstration of an Electromagnetic Force-Rebalanced Sub-10-Hz Interferometric MEMS Accelerometer

Nonlinear Dynamic Analysis of Electrostatically Actuated Resonant MEMS Sensors under Parametric Excitation

Versatile and Effective Design Platform for Surface Acoustic Wave Accelerometers

Quantization noise consideration and characterization in Sigma-Delta MEMS accelerometer.

Modeling Analysis and Simulation of Resonant Accelerometer

A Method to Reduce Harmonic Distortion of MEMS Accelerometer

Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer

Quantifying Effective Noise Sources in Coupled Resonating MEMS sensors