Selective Preparation of Copper Pattern on Glass Substrate

LUO Jian,CHEN Dongshen,LI Mei,LU Qinghua
DOI: https://doi.org/10.3321/j.issn:1005-023x.2006.11.035
2006-01-01
Abstract:A novel solution containing high-molecular PVP (K90) and DAS, which together function as the photoresist, and low-molecular PVP (K30), which serves to stabilise the palladium, is studied in this paper. Patterns are formed by using UV light through a photomask to induce PVP crosslinking and trapping of palladium. After the development under ethanol, the patterned surface is annealed, leaving only palladium particles on which copper could be deposited through electroless plating. SEM is used to investigate the relationship between pattern resolution and development time.
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