A Preparation Method of Patterned Nanoporous Copper

heng yue,cong chun zhang,z q yang,hong wang,gui fu ding,xiao lin zhao
DOI: https://doi.org/10.4028/www.scientific.net/AMR.663.322
2013-01-01
Advanced Materials Research
Abstract:Graphic nanoporous copper (NPC) was prepared by a new method. Cu68Zn32 and Cu36Zn64 (atomic percentages) precursor alloy thin film was deposited by electro-deposition in acidic alloy plating solution and then dealloyed in hydrochloric acid to fabricate nanoporous copper (NPC) with pore size from 30nm to 100nm. The results show that the microstructure of NPC can be controlled by changing alloy plating solution and dealloying process, this process also maintains compatibility with micro-fabrication technique.
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