P-26 Estimation of Magnetostrictive Properties of Tb_<0.24>Dy_<0.76>Fe_<2-x>Ni_x Thin Films
Heung-Shik Lee,Chongdu Cho,Chang-Boo Kim,Hyeon Gyu Beom,Guiping Zhao
DOI: https://doi.org/10.1299/jsmeatem.2007.6._p-26-1_
2007-01-01
The Abstracts of ATEM International Conference on Advanced Technology in Experimental Mechanics Asian Conference on Experimental Mechanics
Abstract:In this study, the effects of Ni on the magnetic, mechanical characteristics of the Tb_<0.24>Dy_<0.76>Fe_2 system for wireless micro actuator with the effect of deposited film thickness of TbDyFeNi on silicon substrate were investigated. To examine the properties, Tb_<0.24>Dy_<0.76>Fe_<2-x>Ni_x, (x=0, 0.5, 1.2, 2.0) films were sputter-deposited on the silicon substrate with the condition as: Ar gas pressure of below 1.2×10^<-9> torr, DC input power of 200W and heating temperature of up to 300℃. After the sputter process, magnetization and magnetostriction of each sample were measured. X-ray diffraction studies also carried out to certificate the film structure and thickness of the sputtered film. From the investigation, unique property was used to build a novel wirelessly controlled array type micro actuator. The micro actuators with film thicknesses of 0.1, 0.5, 1, 2μm were fabricated by silicon micromachining with selective DC magnetron sputtering techniques. For the operation, the array type micro thin film actuators with each branch size of and TbDyFeNi was sputtered on the back side of the each branch for the actuation. Each branch was attracted by externally applied magnetic fields up to 0.5T and motion of the branches made transportation movement. As an application result, deflected distances of the actuators to external magnetic fields were observed.