"Cnt-Polymer" Composite-Film As a Material for Microactuators

Huai-Yuan Chu,Ting-Hsien Chen,Wen-Kuang Hsu,Weileun Fang
DOI: https://doi.org/10.1109/sensor.2007.4300441
2007-01-01
Abstract:This study employed the composite-film to fabricate CNT-polymer microactuators. The actuator is driven using electrostatic, thermal, and optical approaches. The subsequent measurements show that micro-cantilever actuators can be electrically driven at very low pull in voltage compared with existing MEMS elements. Bimorph effect from composite cantilever is also tested. The experimental results show that the output displacement of the actuator by electrostatic approach was 560 mu m at a 50V driving voltage. Moreover, the actuator also moved 560 mu m at only a 160 degrees C temperature variation, and 325 mu m at a 450 mu A driving current. The material also has the potential to apply for optical actuator.
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