Tini Shape Memory Alloy Based Micropumps

YQ Fu,JK Luo,M Hu,HJ Du,AJ Flewitt,WI Milne
DOI: https://doi.org/10.1117/12.608506
2005-01-01
Abstract:Three types of micropumps based on TiNi shape memory alloy thin films were designed and fabricated. The TiNi films were prepared on silicon substrate by co-sputtering TiNi target and a separate Ti target at room temperature, and then post annealed at 650°C. The first pump design is based on a single TiNi/Si bimorph membrane structure with inlet and outlet. The second design is based on three layer structures bonded together, with one TiNi/Si active membrane structure and two layers of check valves. The third design is based on two TiNi/SU-8 composite structures, with TiNi as an actuation element, and SU-8/Si as a spring-back structure. The three types of micropump structures were fabricated based on the conventional MEMS processes.
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