Dry-Release Self-assembling of Microtube Arrays for Catalytic Micropump Application

Jinxing Li,Zhaoqian Liu,Gaoshan Huang,Bing-Rui Lu,Yifang Chen,Yongfeng Mei,Ran Liu

2012-01-01

Abstract:Efficient tiny pumps, mixers and stirrers are essential elements of the microfluidic “factories” on a chip. Bending of strain-engineered nanomembranes into self-assembled round-shape microchannels and wrinkling networks have making the microfluidic integration more promising. For the strain-engineered wrinkles and tubes, common process involves the wet chemical etching of sacrificial layers, which frequently causes the process-induced adhesion and diffusion etching. Here we present a new method to make the predefined stained nanomembranes self-assembled into microtubular pump arrays by a simple thermal induced dry-release process. With a catalytic Pt layer inside, the micropumps can be activated by the catalytic decomposition of peroxide into oxygen microbubbles and water.