Abstract:A versatile and high‐yield fabrication method is developed for Janus micromotors featuring a spherical tip configuration, achieved through the localized photocuring of SU‐8 on a TiO2 microsphere array. These motors exhibit various functionalities by loading dyes onto the spheres or modifying the composition of tips. Moreover, the efficacy of this method in the production of multifunctional double‐tipped motors is demonstrated. Synthetic Janus micro/nanomotors can efficiently convert ambient energy into asymmetrical self‐propulsive force, overcoming random thermal fluctuations and enabling autonomous migration. Further modifications to the motors can equip them with different functional modules to meet different needs. However, developing a versatile and high‐yield fabrication method for multifunctional Janus micromotors remains challenging. In this study, a modular fabrication approach for micromotors with a particle‐tip structure based on the self‐focusing lithography induced by an array of TiO2 microspheres is presented. By adjusting the tip composition or loading, precise programming of motor functionality is achieved, allowing for various capabilities such as photoredox reaction‐induced propulsion, fluorescent imaging, electric and magnetic navigation. Furthermore, the flexibility of this fabrication method by selectively loading materials onto two tips is demonstrated to achieve multifunctionality within a micromotor unit. This study proposes a straightforward and versatile approach for modular functional micromotors.

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