The performance and stability of NiTi photoactuator utilizing photothermal effect of TiN films with tilted columnar structure

L.J. Wei,D.L. Ma,D. Xie,P.P. Jing,Y.X. Leng
DOI: https://doi.org/10.1016/j.sna.2024.115106
2024-04-01
Abstract:Owing to the shape-memory effect, NiTi shape-memory alloys are widely used in microelectromechanical systems and aerospace as actuators. However, external heating units sometimes limit the application of NiTi actuators. In this study, a new type of wireless actuator that utilizes the photothermal effect of TiN films to drive the shape recovery of NiTi alloys was designed and manufactured. TiN films with columnar structure were deposited via magnetron sputtering at different oblique incident angles of plasma flux. The porosity of the TiN films and tilt angle of the columnar structure increased with the deposition angle. Owing to the formation of the light-trapping structure, the light-absorption ratio and intensity of the photothermal effect improved with the increase in the porosity and tilt angle of the columnar structure in the films. The ratio of shape recovery of the photoactuators also increased with the increase in the tilt angle of the columnar structure and porosity of the TiN film, and the performance stability of the TiN/NiTi photoactuators also improved owing to the tilted structure. The TiN/NiTi photoactuators have the potential to be used in microelectromechanical systems and aerospace applications.
engineering, electrical & electronic,instruments & instrumentation
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