X-ray diffraction analysis of Pt film prepared by magnetron sputtering method

Liu Chao-Qian,Li Wei-Li,Fei Wei-Dong
DOI: https://doi.org/10.3321/j.issn:0469-5097.2009.02.004
2009-01-01
Abstract:The fiber type texture of Pt film prepared by magnetron sputtering method was studied,and a method for the characterization of the film fiber texture was presented.The results indicate that the fiber texture in films can be characterized using the special X-ray diffraction technique.The texture in as-sputtered Pt film is diffused.After annealing at 400 ℃ for 5 min,the texture degree of the film becomes very strong.Therefore,the highly fiber texture in annealed Pt film is considered as the result of the recrystallization during the annealing process.
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