Investigation of Fabrication and Hetero-Epitaxy Relationship of CoCrPt Thin Films Grown on CrW Underlayer

Li Song-Tian,Liu Xi,Shi Wen-Kui,Cao Jiang-Wei,Wei Fu-Lin,Wei Dan
DOI: https://doi.org/10.1088/1674-1056/18/4/060
2009-01-01
Chinese Physics B
Abstract:This paper reports that longitudinally oriented CoCrPt thin films with Cr85W15 underlayer and CoCr intermediate layer for use of giant magnetoresistance heads were fabricated by magnetron sputtering. Without CoCr intermediate layer, CoCrPt layer deposited directly on Cr85W15 underlayer which has a dominant (200) texture exhibits unexpected (10 (1) over bar1) texture. After introducing CoCr intermediate layer, the CoCrPt layer shifts into (11 (2) over bar0) texture. This article studies the crystallographic hetero-epitaxy relationship between magnetic layer and underlayer in order to understand the appearance of CoCrPt (10 (1) over bar1) texture on (200) textured Cr underlayer and the influence of CoCr intermediate layer on the inducement of CoCrPt (11 (2) over bar0) texture. The CoCr intermediate layer plays a crucial role in controlling the microstructure and consequently the magnetic properties of the overlying magnetic layer.
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