Three-Beam Diffraction Anomalous Fine Structure of Thin Films

Hsueh-Hung Wu,Yen-Ru Lee,Hsin-Hung Chen,Wen-Shien Sun,Shih-Lin Chang
DOI: https://doi.org/10.1107/s0108767305082723
2005-01-01
Abstract:The surface modification of titanium by micro-arc oxidation under various voltages was performed to form a porous titania layer which may improve the biocompatibility of titanium implants.The phases and residual stresses of the porous layers were measured with twodimensional X-ray diffraction.The results show the porous layers contain anatase (TiO 2 ) and rutile (TiO 2 ).The content of rutile (TiO 2 ) increases with increasing voltage.At 450V, anatase peaks almost disappear and many new peaks appear in the profile, some of them are identified as polymorphous CaTiO 3 .The residual stresses in the porous layers are compressive and increase with increasing voltage.This presentation also introduces the recent progress in twodimensional X-ray diffraction using the above application as an example for microstructure and residual stress analysis.The twodimensional X-ray diffraction provides far more information than the conventional X-ray diffraction.Phase identification can be done by integration over a selected range of diffraction rings.The integrated data gives better intensity and statistics, especially for those samples with texture, large grain size, thin film or small quantity.Stress measurement using two-dimensional detector is based on a direct relationship between the stress tensor and the diffraction cone distortion.
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