Effect of Pt film thickness on PtSi formation and film surface morphology

Jinghua Yin,Wei Cai,Yufeng Zheng,Liancheng Zhao
DOI: https://doi.org/10.1016/j.surfcoat.2004.10.070
IF: 4.865
2005-01-01
Surface and Coatings Technology
Abstract:The effect of Pt film thickness on the formation of platinum silicide (PtSi) phase, distribution of silicides, and surface morphology of PtSi/Si films was investigated with X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and atomic force microscopy (AFM). It was shown that when the film structure was changed from PtSi/Si to Pt/Pt2Si+PtSi/PtSi/Si, the film morphology changed from a smooth surface to a coarse columnar structure with the increase of the Pt film thickness.
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