Typical Structures and Developing Trends of MEMS Relays

HUANG Hu,YOU Zheng,RUAN Yong,ZHANG Chi

DOI: https://doi.org/10.3969/j.issn.1000-9787.2011.07.001

2011-01-01

Abstract:The principles and typical structures of MEMS relays based on MEMS technology at home and abroad are summarized.The characteristics of various MEMS relay such as electrostatic,electromagnetic,electrothermal,liquid-filled and hybrid MEMS relays are compared.

What problem does this paper attempt to address?

The Conception of MEMS and Current Development at Home and Abroat

刘文耀,杜君文,应济

DOI: https://doi.org/10.3969/j.issn.1002-2333.2001.02.002

2001-01-01

Abstract:The principle and relevant technology of GEMS are introduced. The current development of this technology at home and abroad and the prospect are also involved.
An Review of MEMS-based Microrelay Evolution and Its Key Issues

YOU Zheng,LI Hui-juan,ZHANG Gao-fei

DOI: https://doi.org/10.3969/j.issn.1004-2474.2006.03.009

2006-01-01

Abstract:The rapid development of MEMS-based microrelay is mostly contributed to the urgent demanding in application such as communication,which is extensively improved by microelectronic technology and microfabrication.Characteristics of variable microrelay are particularly demonstrated through presenting the development of microrelay.Besides,microrelay's fundamental structures and electrical contact issues are analyzed,including their developing trend and challenge.
Discussion on Micro Electromagnetic Relay Based on MEMS Technology

任万滨,翟国富,李德胜,肖伟耀

DOI: https://doi.org/10.3969/j.issn.1000-6133.2004.03.001

2004-01-01

Abstract:With the advantage of small volume, low power consumption, quickly switch, and high stability, the micro electromagnetic relays based on MEMS technology will cover the shortage between traditional electromagnetic relay and solid state relay. The design feature and operation principle of micro electromagnetic relay was illustrated by a micromechanical electromagnetic relay in this paper, and some key parameters influence movement performance was analyzed. In the end, fabrication features of MEMS and future research direction was stated.
Study Of A Micro Electromagnetic Relay Based On Mems

Yf Zhang,Ds Li,Jw Sun

2001-01-01

Abstract:This paper presents a novel micro electromagnetic relay based on MEMS technology. The micro relay includes some characteristics such as small volume, rapid response and longevity, moreover, it takes performances between the common electromagnetic relay and the solid-state one. The author proposes a few special researches found on this kind of relay in this paper. At first the working theory and the design concerned with the micro relay are explained in brief. Then the fabrication process of the relay is expatiated in detail. At last we have a simulation analysis for the relay by using ANSYS, and provide some beneficial properties with the simulation results.
Research Status of Macro-Modeling of MEMS Devices for Systems Level Simulations

林谢昭,应济

DOI: https://doi.org/10.3969/j.issn.1000-9787.2008.04.003

2008-01-01

Abstract:The key of commercial successes of MEMS rests with computer aided methodology in the field of MEMS design and manufacture.The reason that causes MEMS design complexity and hardship is discussed.The hierarchy of MEMS CAD is introduced.The state of research in MEMS macro-modeling approaches at home and abroad are also introduced and summed up.The emphases are aimed at the MEMS devices compact-modeling(order-reduced modeling) methods and the macro-model's representation.The two keystones in the nonlinear macro-modeling are the representation of the original system's nonlinear characteristics and the realization of automatic model reduction.Some suggestions for the further researches are proposed
Development of a Novel Bi-stable MEMS Electromagnetic Microrelay

FU Shi,DING Gui-fu,WANG Yan

DOI: https://doi.org/10.3321/j.issn:1006-2467.2006.11.028

2006-01-01

Abstract:The design,fabrication and main performance of a novel bi-stable MEMS electromagnetic microrelay were introduced.Bi-directional pulse currents actuate the highly efficient "sandwich" driver mechanism and make the electronic brush move to control the on/off state of the outer circuit.Microrelay can keep stable states without other power contributed to the aided design,permanent magnetic structure,at the interval between the adjacent pulses.The measurement results indicate that the novel microrelay fabricated by MEMS technology has the following merits such as small volume,high response speed,low power consumption and resistance and so on.
Finite Element Analysis of Magnetic Structures for Micro-Electro-mechanical Relays

WB Ren,GF Zhai,QY Wang,DS Li

DOI: https://doi.org/10.1109/holm.2005.1518254

2005-01-01

Abstract:Micro-electro-mechanical system technology offers great promise in addressing the need for smaller electromechanical relays, and may bridge the performance and economic gaps between conventional electromechanical technology and solid state devices. It is necessary for electromagnetic field analysis during design process of micro-electro-mechanical relay. Planar coil and magnetic plate structures were modeled by using finite element method in this paper. Furthermore the open domain magnetic field views of micro-electro-mechanical relay with different structures were compared. And the electromagnetic attraction force of movable contacts in MEMS relay was analyzed, thus can not only simplify the fabrication procedure, but also develop the working performance of products. The results of the analysis can be useful for designers to develop optimal magnetic structure of micro-electro-mechanical relays.
Development of a Novel Electric-Thermal-Driven MEMS Micro-Relay

胡志军,陈迪,黄闯,陈翔,朱军,刘景全

DOI: https://doi.org/10.3969/j.issn.1004-1699.2009.12.004

2009-01-01

Abstract:A novel electric-thermal-driven micro-electronic-mechanical(MEMS)relay was developed,and the performance test was carried out.The non-silicon MEMS fabrication process was used,Cu as sacrifice material and Ni as structural material.The micro-relay can obtain larger travel,which is based on the principle of leverage.The driving arm,utilizing U shape-beam design,can produce larger driving force by small power.Ansys10.0 finite element analysis software was used to simulate and analyze.Testing result shows that this novel micro-relay has advantages of small volume,low driving voltage,and fast repetition rate.
Research of a New Type MEMS Electromagnetic Relay

刘亮,赵小林,戴旭涵,鲁李乐,丁桂甫

DOI: https://doi.org/10.3969/j.issn.1005-9490.2008.05.032

2008-01-01

Abstract:This paper introduces a MEMS electromagnetic relay with small volume and easy integration.This relay includes two layers of 1 mm×1 mm planar Cu coils,permalloy cantilever,and polyimide insulation layer.The working principle is introduced.Simulation has been performed to decide the gap width and cantilever thickness.The surface micromachining and microelectroplating method is used to fabricate the relay.
Structure classification of electromagnetic relays and comparison of typical magnetic system containing permanent magnet

huimin liang,jiaxin you,xie yong,guangcheng ma,guofu zhai

DOI: https://doi.org/10.1109/HOLM.2014.7031067

2014-01-01

Abstract:The electromagnetic relays have lots of structures and are applied widely in the automation control system in aerospace. Firstly, the structures of aerospace electromagnetic relays (AEMR) were classified. According to the structure arrangement, there are three layers, two layers and one layer structures; from electromagnetic system, there are clapper type, balance armature type, polarized magnetic system and balance force magnetic system; from armature returning mode, there are spring returning, permanent magnet returning, permanent magnet magnetic circuit returning and polarized magnetic circuit returning modes. All of these structures were compared separately. Then, the equivalent magnetic circuit model of the typical polarized magnetic system and balance force magnetic system are founded. The ultimate difference between these magnetic systems was illuminated based on the polarized magnetic system criterion. The research conclusions can be used to direct the design of AEMR.
Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage.

Hao Li,Yong Ruan,Zheng You,Zhiqiang Song

DOI: https://doi.org/10.3390/mi11020171

IF: 3.4

2020-01-01

Micromachines

Abstract:Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, low power consumption, and abrupt switching characteristics. Nevertheless, the widespread application of MEMS relays has been limited due to the issue of the conflict between low actuation voltages and high device performance. This article presents a novel cantilever MEMS relay with an embedded contact electrode which helps to achieve a low actuation voltage (below 8 V) and high restoring force simultaneously. Meanwhile, the contact resistance is as low as around 0.4 Ω and the reliability is verified. To thoroughly investigate and analyze the novel cantilever MEMS relay, a static theoretical model of the structure was developed. Based on the model, the cantilever MEMS relay was designed and optimized. Then, the relays were fabricated by the bulk-silicon micromachining process based on the silicon–glass anodic bonding technology. Finally, the switching performance of the novel cantilever MEMS relay was measured. Experimental results demonstrate that the proposed MEMS relay has a low actuation voltage below 8 V and high performance, which is in good agreement with the simulation results, and shows significant advantages when compared with previous reports. Therefore, the proposed MEMS relay with an embedded contact electrode is promising in practical applications.
Fabrication Technology and Dynamic Characteristic of a New Type MEMS Bi-Stable Electromagnetic Relay

Kong Lingfei,Dai Xuhan,Miao Xiaodan,Ding Guifu,Zhao Xiaolin

DOI: https://doi.org/10.3969/j.issn.1001-4616.2010.03.008

2010-01-01

Abstract:A new type MEMS bi-stable electromagnetic relay is presented.The bulk silicon micromachining and metal-based surface micromachining technology is used to fabricate this actuator.The parameters of the device are optimized by Ansys and Matlab software.The feasibility of the bi-stable characteristic is also studied.According to the characteristics of the relay's mechanical system,the relay's collision time was analyzed,and theory and test result were discussed.It is the foundation of the next generation of micro relay which has the property of smaller size,lower depletion and shorter response time.
Design and fabrication of a magnetic bi-stable electromagnetic MEMS relay

Shi Fu,Guifu Ding,Hong Wang,Zhuoqing Yang,Jianzhi Feng

DOI: https://doi.org/10.1016/j.mejo.2007.03.015

IF: 1.992

2007-01-01

Microelectronics Journal

Abstract:This paper describes the principles, design, fabrication and performance of a new type of electromagnetic bistable MEMS relay. The microdevice is operated by a wiggling microactuator, which is symmetrically assembled with two integrated planar windings and one permanent rotor in the form of sandwich with coaxial sustained gaps between each other. The micromachined rotor moves to-and-fro around the axis and operates the joined brush to open or close external circuit. This hybrid MEMS relay has been provided with fast response and latching function owing to the special design. The response time is about 0.3ms and the maximum load current is 2A.
Experiment and simulation study of instability of a novel electrostatic MEMS relay

Congshun Wang,Weibin Zhang,Chunyang Xiong,Jing Fang

DOI: https://doi.org/10.1117/12.468762

2002-01-01

Abstract:In this paper, the mechanical-electronic behavior of a bulk-micromachined relay driven by electrostatic actuator for lateral movement, is experimentally studied and simulated. Due to the small size, the deformation measurement of the MEMS relay is very difficult on a macroscopic scale. The digital image correlation technology was employed to determine the dimensions and displacements of the moving relay. Based on the video films and the collapse deformation of the structure, the pull-in voltages were obtained that represented the instability characteristic of the micro-system. Meanwhile, by combining the tools of finite element method (FEM) and boundary element method (BEM), the instability behaviour of the MEMS relays was numerically simulated with an electronic-mechanical coupling analysis. The simulation results obtained by this hybrid computation of combining FEM and BEM are in good agreement with the experimental ones.
High-power mems relay array with improved reliability and consistency

B. Ma,Z. You,Y. Ruan,S.K. Chang,G.F. Zhang

DOI: https://doi.org/10.1109/transducers.2015.7181386

2015-01-01

Abstract:This paper presents a power MEMS relay array with numerous improvements in current-carrying capacity, which adopts silicon-on-insulator (SOI) anodic bonding technology to significantly improve the reliability and consistency of the relay matrix. The relay array is designed as a matrix of microcantilevers connected in parallel to allocate high power to individual relays. This method allows the relay matrix to be configured according to different power requirements. The proposed novel hollow suspended springs ensure that the microcantilevers driven by electrostatic parallel-plate actuators have small driving voltage and high stability.
A fast and low power consuming double stability MEMS microrelay

Li,Huijuan,You,Zheng,Zhang,Gaofei,Yang,Jianzhong

DOI: https://doi.org/10.3969/j.issn.1007-4252.2008.02.048

2008-01-01

Abstract:In this paper,with the magnetic field characteristic by electrified planar spiral coil applied,double coils' mirror layout and its' parallel connection is smartly introduced in this device.A fast and low power consuming double stability micro relay is proposed with its working theory and micro aching technology.The relay switched from 0.1ms to 0.2ms when control current ranges between 80mA and 120mA.It exhibits the outstanding performance,such as small、fast switching、low power consuming、easy integration and array,which is mostly suitable in Mircosatllite and ATE.
Research Status and Development Trend of MEMS Switches: A Review

Tongtong Cao,Tengjiang Hu,Yulong Zhao

DOI: https://doi.org/10.3390/mi11070694

IF: 3.4

2020-07-17

Micromachines

Abstract:MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Electrostatically actuated MEMS relay arrays for high-power applications

Bo Ma,Zheng You,Yong Ruan,Shuangkai Chang,Gaofei Zhang

DOI: https://doi.org/10.1007/s00542-015-2660-y

2015-01-01

Abstract:Micro-electromechanical systems (MEMS) relays should have high current-carrying capability and high device reliability for high-power applications. The current-carrying capability of MEMS relays is mainly limited by the thickness of metal contacts fabricated by micromachining process. Another significant limiting factor is the high contact resistance resulted from the low driving force, which is provided by microactuators. This paper presents a matrix configuration of electrostatically actuated microcantilever relay arrays that are connected in parallel to shunt high currents to individual relay elements. This method allows the matrix to be configured for different power requirements. The proposed novel hollow suspended spring lowers the driving voltage and enhances the device stability considerably because of its low longitudinal stiffness while high lateral stiffness. The average of pull-in voltages is approximately 39.4 V and the overdamped switching-on time is approximately 180 μs when 42 V of driving voltage is applied. Contact resistance of each relay is less than 1 Ω, and the equivalent contact resistance of the 2 × 2 relay arrays is lower than 250 mΩ. Each relay can operate in over 6.5 × 10 3 hot-switching cycles without failing at a current of 20 mA with 0.3 μm thick Au contacts, thus the 2 × 2 relay arrays can carry four times currents more than one single relay. Therefore, the proposed MEMS relay arrays are suitable for applications in high-power switching systems that require high reliability and stability, such as space applications.
Design of a High Power MEMS Relay with Zero Voltage Switching and IsolatedPower and Signal Transfer

Yan Zhang,Wenbo Liu,Lei Kou,Yan-Fei Liu,Chris Keimel

DOI: https://doi.org/10.1109/apec.2018.8341288

2018-01-01

Abstract:This paper proposes a MEMS relay circuit by paralleling an auxiliary MOSFET with a MEMS switch. During the turn-on and turn-off transition, MOSFET is turned on at first to guarantee the switching voltage of MEMS switch is almost zero; for normal switch-on condition the MEMS switch with low on-resistance is turned on and the MOSFET is turned off. To meet the requirement of isolation between control side and power side, a transformer is designed in the control circuit and this single transformer achieves both power transfer and on off control signal transfer. Thus the size of MEMS relay is reduced. Finally, a prototype was built and it validates the design of MEMS relay structure and single transformer circuit. Superior switching performance, fast response, low on-resistance and small size are achieved by the MEMS relay.
Recent Advances in MEMS Technologies for RF and Microwave Applications

吴群,傅佳辉

DOI: https://doi.org/10.3969/j.issn.1005-9490.2001.04.010

2001-01-01

Abstract:Microelectromechanical system(MEMS) represents an exciting new technology derived from the same fabricating processes used to make integrated circuits. The trends of growing importancce of the wireless communications market is toward the system with minimal size, cost and power consumption. For the purpose of MEMS RD used for wireless communications, a history and present situation of MEMS device development are reviewed in this paper, and an overview of MEMS research topics on RF communication applications and the state of the art technologies are also presented here.

Typical Structures and Developing Trends of MEMS Relays

The Conception of MEMS and Current Development at Home and Abroat

An Review of MEMS-based Microrelay Evolution and Its Key Issues

Discussion on Micro Electromagnetic Relay Based on MEMS Technology

Study Of A Micro Electromagnetic Relay Based On Mems

Research Status of Macro-Modeling of MEMS Devices for Systems Level Simulations

Development of a Novel Bi-stable MEMS Electromagnetic Microrelay

Finite Element Analysis of Magnetic Structures for Micro-Electro-mechanical Relays

Development of a Novel Electric-Thermal-Driven MEMS Micro-Relay

Research of a New Type MEMS Electromagnetic Relay

Structure classification of electromagnetic relays and comparison of typical magnetic system containing permanent magnet

Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage.

Fabrication Technology and Dynamic Characteristic of a New Type MEMS Bi-Stable Electromagnetic Relay

Design and fabrication of a magnetic bi-stable electromagnetic MEMS relay

Experiment and simulation study of instability of a novel electrostatic MEMS relay

High-power mems relay array with improved reliability and consistency

A fast and low power consuming double stability MEMS microrelay

Research Status and Development Trend of MEMS Switches: A Review

Electrostatically actuated MEMS relay arrays for high-power applications

Design of a High Power MEMS Relay with Zero Voltage Switching and IsolatedPower and Signal Transfer

Recent Advances in MEMS Technologies for RF and Microwave Applications