Abstract:Nickel (Ni) induced crystallization of amorphous silicon (a-Si) has been studied by selective deposition of Ni on a-Si thin films. The a-Si under and near the Ni-covered regions was found to be crystallized after heat treatment at 500 °C from 1 to 90 h. Micro-Auger electron spectroscopy revealed that a large amount of Ni stayed in the region under the original Ni coverage, but no Ni was detected either in the crystallized region next to the Ni coverage or in the amorphous region beyond the front of the laterally crystallized Si. X-ray photoelectron spectroscopy revealed a nonuniform Ni distribution through the depth of the crystallized film under the original Ni coverage. In particular, a Ni concentration peak was found to exist at the interface of the crystallized Si and the buried oxide. It was found that a layer of 5-nm-thick Ni could effectively induce lateral crystallization of over 100 μm of a-Si, but the lateral crystallization rate was found to decrease upon extended heat treatment. Transmission electron microscopy analysis showed that the crystallized film under the Ni coverage was composed of randomly oriented fine grains, while that outside the Ni coverage was mainly composed of large (110)-oriented grains. A unified mechanism is proposed to explain the Ni induced crystallization of a-Si and possible reasons for the reduction in the lateral crystallization rate are discussed.

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Ultrafast growth of single-crystalline Si nanowires

Nickel Induced Crystallization of Amorphous Silicon Thin Films

Sulfide-assisted Growth of Silicon Nano-Wires by Thermal Evaporation of Sulfur Powders

Mass Production of Α-Silicon Nitride Single-crystalline Nanowires

Silicon nanowires fabricated by thermal evaporation of silicon monoxide

Synthesis and Characterization of Amorphous SiO2 Nanowires Via Pulsed Laser Deposition Accompanied by N2 Annealing

A Novel Sulfide-Assisted Growth of Silicon Nano-Wires

A simple method to synthesize Si3N4 and SiO2 nanowires from Si or Si/SiO2 mixture

Phase-controlled Synthesis of Nickel Silicide Nanostructures

Tiny SiO2 nano-wires synthesized on Si (111) wafer

Growth of Nickel Films on the Surface of Silicon Nanowire

Silicon Nano-Wires Fabricated by a Novel Thermal Evaporation of Zinc Sulfide

Silicon Nano-Wires Fabricated by Thermal Evaporation of Silicon Wafer

Tiny SiO2 nano-wires synthesized on Si (1 1 1 ) wafer

Preparation and Characterization of Amorphous Siox Nanowires

Growth of SiO2 Nanowires Co-Catalyzed by Carbon and Nickel Particles

Synthesis of Si 3 N 4 Nanowires by Catalyst‐free Nitridation of (si + SiO 2 ) Mixture

Synthesis and Characterization of Several alpha-Silicon Nitride Nanostructures

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