Interstitial-carbon-related defects in relaxed SiGe alloy: the effect of alloying

A Mesli,A Nylandsted Larsen
DOI: https://doi.org/10.1088/0953-8984/17/22/004
2005-01-01
Abstract:C-i and CiCs are two main defects produced via the Watkins replacement mechanism when Si-based materials containing carbon are subjected to particle irradiation. In the present article we re-examine our experimental observations reported on these defects in relaxed Si1-xGex alloy layers in the light of very recent and thorough theoretical investigations (Venezuela et al 2004 Phys. Rev. B 69 115209 and Balsas et al 2004 Phys. Rev. B 70 085201). In addressing these defects two main issues are taken up. Firstly, the role of alloying upon the position of the electrical levels in the bandgap is considered: a linear shift towards the valence band with the same rate of all related levels is observed experimentally and predicted theoretically. Secondly, the dynamics of migration of interstitial carbon (C-i) in the process of forming CiCs is analysed. Our suggestion that C-i migrates via Si-based paths has now found theoretical justification.
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