Development of measurement system about light-section microscope for surface roughness

Liu Ying,Lang Zhiguo,Tang Wenyan

DOI: https://doi.org/10.3969/j.issn.1007-2276.2012.03.042

2012-01-01

Infrared and Laser Engineering

Abstract:A material surface roughness measurement system based on light-section principle and consisted of CCD camera and conventional light-section microscope as well as by using of VC development tool and image process technique was developed.Due to the characteristic that the image of the material surface roughness under light-section microscope had obvious directivity,the images were preprocessed by using of the spin filtering method and the roughness measurement results were compared with the ones based on the conventional filtering methods.The influences of the size of filter window and the filtering method on the tangent direction on measurement results were discussed at the same time.All parameters of the new national standard can be measured by using of this measurement system,and the on-line measurement can be realized.The calibration method of the system was introduced and the main error factors of influencing measurement precision were analyzed.The arithmetical mean deviation Ra which value was 3.2 μm was measured,and the result is 2.93 μm and the relative error is-8.5% which is less than the indicating value allowable error of the system.