Deep-scan Analysis of Composition and Valence of Vanadium Oxide Thin Film

魏雄邦,蒋亚东,吴志明,廖家轩,贾宇明,田忠
DOI: https://doi.org/10.3321/j.issn:1005-023X.2009.22.001
2009-01-01
Abstract:Vanadium oxide thin film with the thickness of 500nm is prepared. Deep-scan analysis of composition and valence of the film is made. The deep-scan analysis reveal that with scan depth increasing,the O/V ratio and the vanadium valence of the film changes gradiently,especially within scan depth of 80nm. It is believed that the phenomena above are correlated with the stability of the vanadium oxides and the preparing technology.
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