Fractal Structure Appeared in Ion-Implanted A-Ge/ag Bilayer Films after Annealing

Hou Jianguo,Wu Ziqin
DOI: https://doi.org/10.1088/0256-307x/5/10/004
1988-01-01
Chinese Physics Letters
Abstract:The agglomeration in ion-implanted a-Ge/Ag bilayer films has been investigated by use of transmission electron microscopy (TEM). There are two kinds of fractal structures, one of which is soot-like with fractal dimension (FD) of 1.515, the other is snow-flake-like with FD of 1.797. The result is compared with that of the unimplanted film, and the mechanism of the occurrence of fractal regions is also discussed.
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