Preparation of PT Film Used as a Seed Layer to Fabricate Oriented PST Thin Films

Chen Jingfeng,Du Piyi,Qin Ying,Han Gaorong,Weng Wenjian
DOI: https://doi.org/10.3321/j.issn:1002-185x.2008.z2.032
2008-01-01
Rare Metal Materials and Engineering
Abstract:TbCl(3) doped PbTiO(3) (PT) thin films were successfully prepared on ITO/glass substrate by sol-gel method with high preferred orientation. Through analyzing the XRD patterns of PT thin films fabricated with different precursor solutions, heat treatment processing, annealing time and temperature, an optimized process was attained. And on the basis of oriented PT layer, PST thin films with preferred orientation were prepared by sputtering. The experimental result revealed that PST thin films with preferred orientation could be prepared by random oriented ITO/glass substrate with oriented PT as a seed layer.
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