Preparation PST Thin Films with Homogeneity Buffer Layer by RF Magnetron Sputtering Method

LI Min-rui,DU Pi-yi,YUAN Dong-sheng,WANG Wen-si

DOI: https://doi.org/10.3969/j.issn.1004-2474.2008.03.026

2008-01-01

Abstract:The PbxSr1-xTiO3 (PST) bilayer thin films have been prepared by the radio frequency magnetron sputtering deposition method. The bilayer thin films use the low density thin films prepared at lower sputtering power as the buffer layer (homogeneity buffer layer). XRD, SEM, impedance analyzer, ferroelectric analyzer were employed to analyze the phase structure, superficial appearance, dielectric loss and the ferroelectric property of the thin films. The result indicated that using the low density PST thin film as the homogeneity buffer layer could reduce the flaw in the bilayer thin films, thus effectively reduced the dielectric loss.