Magnetron Sputtering Derived (100) Oriented Pb0.4Sr0.6(Ti0.97Mg0.03)O2.97 Thin Film on Inducing-Layer/glass Substrate with Outstanding Tunability

Junjie Fang,Tao Hu,Jingfeng Chen,Gaorong Han,Wenjian Weng,Ning Ma,Peng Du
DOI: https://doi.org/10.1016/j.apsusc.2013.10.002
IF: 6.7
2013-01-01
Applied Surface Science
Abstract:Pb 0.4 Sr 0.6 (Ti 0.97 Mg 0.03 )O 2.97 (PST) thin films were deposited on ITO/glass substrates with (1 0 0)/(0 0 1) oriented Tb-doped-PbTiO 3 (Tb-PT) layer inserted by magnetron sputtering method at room temperature. And the PST thin film is well-crystallized in (1 0 0) direction at annealing temperature of 600 °C for 30 min. The oriented Tb-PT layer promotes a (1 0 0) orientation, restrains structural distortion and improves phase quality of PST thin film. The (1 0 0) oriented PST thin film has higher permittivity and lower dielectric loss compared with the randomly oriented one. The tunability of the PST thin film is dramatically improved by 90% compared to that of randomly oriented PST without Tb-PT inserting layer, from 33% for randomly oriented PST without the inserting layer to 62.66% for the oriented one with the inserting layer. It is attractable to be used in high quality dielectric tunable devices.
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