Abstract:Micro-air-gap-based extrinsic Fabry-Perot interferometers (EFPIs) are used for a variety of applications in sensing and communications, and are typically made by manual cleaving or hydrofluoric acid etching.1–4 They offer a number of useful properties including in-line operation from an all-fiber device, compactness, and good temperature stability. Mass-producing EFPIs is difficult, however, because the process involves manual alignment, assembly, and adhesion. This increases the cost and variability between devices. We report the first demonstration of a fiber in-line etalon with a self-enclosed cavity that has excellent characteristics. This etalon is fabricated using 157nm laser micromachining. Its properties include excellent interferometric fringe visibility of up to ∼30dB, which we believe is the best visibility yet reported for an all-fiber in-line etalon. It also offers great mass-production potential: good reproducibility and low cost are possible because the laser micromachining process can be automated. Finally, this etalon design offers excellent temperature stability. The 157nm laser micromachining system consists of a pulsed laser, an optical focusing system with 25 × demagnification, an observing system, and a precise translation stage system (see Figure 1). Because the 157nm source has high single-photon and pulse energy and a high absorption coefficient for many materials, it offers ideal characteristics for high quality micromachining. The process of forming the self-enclosed fiber Fabry-Perot (FP) cavity is shown in Figure 2. First, a circular micro-hole with a typical depth and diameter of tens of micrometers is made at the tip of a cleaved optical fiber by the 157nm laser. Next, an inline FP cavity is enclosed by simply splicing the first fiber to another cleaved fiber. Hence, such a micro etalon can be operated in high temperature environments of up to ∼800◦C and the selfclosed structure makes the etalon robust, stable, and reliable. It is also insensitive to temperature change due to the hollow core Figure 1. Schematic of the micromachining system with a 157nm excimer laser.

Self-Enclosed All-Fiber In-Line Etalon Strain Sensor Micromachined by 157-nm Laser Pulses

Self-Enclosed All-Fiber In-Line Etalon

Highly Sensitive and Fast Response Strain Sensor Based on Evanescently Coupled Micro/nanofibers

Miniature In-Line Photonic Crystal Fiber Etalon Fabricated by 157 Nm Laser Micromachining

Multilongitudinal Mode Fiber Laser for Strain Measurement

Compact Fiber Strain Sensor Fabricated by a CO2 Laser.

High-Sensitivity Microfiber Strain and Force Sensors

A dual-wavelength erbium-doped fiber laser for high resolution strain sensing with compound filter of a Sagnac loop and a long period fiber grating

Temperature self-compensation strain sensor based on cascaded concave-lens-like long-period fiber gratings

Strain sensor system based on a high finesse fiber Bragg grating Fabry-Perot cavity

Narrow Linewidth Half-Open-Cavity Random Laser Assisted by a Three-Grating Ring Resonator for Strain Detection

Optic Fiber Sensors Fabricated by Laser-Micromachining

Strain Force Sensor with Ultra-High Sensitivity Based on Fiber Inline Fabry-Perot Micro-Cavity Plugged by Cantilever Taper

Miniature Optical Fiber Strain Sensor Based on Fabry-Perot Interferometer

Fabricating In-Line Fiber Etalons Efficiently

A Dynamic Strain Sensor System Based on a Tunable Fiber Ring Laser

Highly Sensitive Temperature-Independent Strain Sensor Based on a Long-Period Fiber Grating with a CO$_{2}$-Laser Engraved Rotary Structure

All-Fiber Strain Sensor Based on Dual Side V-Grooved Long-Period Fiber Grating

Optical fiber Fabry-Perot interferometer based embeddable strain sensor with 30 nano-strain resolution

Design of an All-Fiber Fabry-Perot Sensor for Strain Measurement in Radiative Environment

A Fiber Strain Sensor with High Resolution and Large Measurement Scale