The structural and electrical properties of oriented SrTiO3 films prepared by metal organic deposition method

Xiaofei Wang,Xiaomei Lu,Huifeng Bo,Yaoyang Liu,Yanchi Shen,Xiaobo Wu,Wei Cai,Yi Kan,Chao Zhang,Yunfei Liu,Fengzhen Huang,Jinsong Zhu
DOI: https://doi.org/10.1016/j.ssc.2010.06.035
IF: 1.934
2010-01-01
Solid State Communications
Abstract:Strontium titanate films with high a-axis orientation [a(100)=94.1%] and random orientation were deposited on (111) Pt/Ti/ SiO2/Si substrates by a concentration controlling of the precursor solution during the metal organic deposition process. Topography of samples was investigated by atomic force microscopy after annealing at 800 °C. X-ray diffraction found that the degree of a-axis orientation increased with increasing annealing temperature. The leakage current and the dielectric property were strongly dependent on the film orientation, and the possible causes of orientation dependence were discussed.
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