Abstract:The electrical power consumption, which is approximately equal to the thermal budget, accounts for the majority of the total cost to synthesize diamond films by the hot filament chemical vapor deposition (HFCVD) apparatus. In this study, two strategies, visualizing as certain additional parts in the apparatus, are proposed for reducing the thermal budget and synthesis cost. Detailed effects are proven by the finite volume method (FVM) simulation, temperature measurement and deposition experiments, demonstrating that the reduction of thermal conductivity of the worktable (by changing the worktable material) and the insertion of the circular ring copper shielding will significantly contribute to the reduction of the heat dissipation and substrate temperature rise. Influences of major filament parameters on substrate temperature values and distributions are then clarified, suggesting that in order to control the substrate temperatures in a similar and reasonable range in the modified apparatus, the best choice is to synchronously reduce the filament diameter and the electrical power, while retaining the filament temperature still in a high level (around 2200 °C). Finally, the energy saving ratios are as high as 28.4% (experimental apparatus) and 27.4% (commercial apparatus), and the substrate temperature distributions can also be improved, guaranteeing the uniformity of as-deposited diamond films on mass substrates.

Thermodynamic prediction of deposition parameters for diamond synthesis in atmospheric oxyacetylene flames

Gowth conditions for diamond synthesis in atmosphere oxyacetylene flames

Phase diagram for diamond growth in atmospheric oxyacetylene flames

Thermodynamic Analysis for Vapor-Grown Diamond

Phase diagram calculation of diamondgrowth from low pressure gases

A Kinetic Model for the Initial Growth of Diamond Films

Numerical Simulation of Nanoparticle Synthesis in Diffusion Flame Reactor

Phase diagrams for activated CVD diamond growth

Thermodynamic Analysis for Chemical Vapor Deposition Diamond with the Participation of Chlorine

Phase Diagrams for Cvd Diamond Deposition from Halogen-Containing Gas Phase

Calculation of diamond phase diagrams in the CO/H2 system under low pressure

Projective Phase Diagrams for CVD Diamond Growth from C–H and C–H–O Systems

Thermodynamics Analyses of the Effect of CH 3 and C 2 H 2 on Morphology of CVD Diamond Films

Thermodynamic coupling effect and catalyst effect for the artificial diamond growth

Effects of activation temperature on diamond growth in C-H, C-O and C-H-O system under low temperature

Development of HFCVD apparatus for synthesizing diamond films with low thermal budget

Effect of methane flow rate on gas-jet MPCVD diamond synthesis

Phase diagrams for low pressure diamond synthesis in carbon-hydrogen-fluorine system

Thermodynamic analysis of phase diagram for diamond growth from methane-hydrogen gas mixture

Facile Diamond Synthesis from Lower Diamondoids

Effects of Fluorine Addition on Driving Force for CVD Diamond Growth