Abstract:Particle-in-cell/Monte Carlo collision (PIC/MCC) simulations are performed to investigate the asymmetric secondary electron emission (SEE) effects when electrons strike two different material electrodes in low pressure capacitively coupled plasmas (CCPs). To describe the electron-surface interactions, a realistic model, considering the primary electron impact energy and angle, as well as the corresponding surface property-dependent secondary electron yields, is employed in PIC/MCC simulations. In this model, three kinds of electrons emitted from the surface are considered: (i) elastically reflected electrons, (ii) inelastically backscattered electrons, and (iii) electron induced secondary electrons (SEs, i.e., δ-electrons). Here, we examined the effects of electron-surface interactions on the ionization dynamics and plasma characteristics of an argon discharge. The discharge is driven by a voltage source of 13.56 MHz with amplitudes in the range of 200–2000 V. The grounded electrode material is copper (Cu) for all cases, while the powered electrode material is either Cu or silicon dioxide (SiO2). The simulations reveal that the electron impact-induced SEE is an essential process at low pressures, especially at high voltages. Different electrode materials result in an asymmetric response of SEE. Depending on the instantaneous local sheath potential and the phase of the SEE, these SEs either are reflected by the opposite sheath or strike the electrode surface, where they can induce δ-electrons upon their residual energies. It is shown that highly energetic δ-electrons contribute significantly to the ionization rate and a self-bias forms when the powered electrode material is assumed to be made of SiO2. Complex dynamics is observed due to the multiple electron-surface interaction processes and asymmetric yields of SEs in CCPs.

Effect of Dielectric Barrier Discharge on Semiconductor Si Electrode Surface

Effect of Atmospheric Pressure Dielectric Barrier Discharge Air Plasma on Electrode Surface

Electrical Modeling of Dielectric Barrier Discharge Considering Surface Charge on the Plasma Modified Material

The effect of air plasma on barrier dielectric surface in dielectric barrier discharge

Effect Of Surface Charge Trapping On Dielectric Barrier Discharge

Mechanisms of Surface Charge Dissipation of Silicone Rubber Enhanced by Dielectric Barrier Discharge Plasma Treatments

Comparisons of discharge characteristics of a dielectric barrier discharge with different electrode structures

The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials

Surface Discharge Phenomena of Silicon in Atmospheric Air

Surface Treatment by Dielectric Barrier Discharge with Wire Mesh Electrodes

Surface ionization wave propagation in the nanosecond pulsed surface dielectric barrier discharge: the influence of dielectric material and pulse repetition rate

The Power Source Effect on SiOx Coating Deposition by Plasma Enhanced Chemical Vapor Deposition

Surface Diversifying and Deuterium Retention Characteristics of Doped Graphite with SiC Coating Exposed to Plasma Discharges in EAST Tokamak

Surface Potential Decay and DC Surface Flashover Characteristics of DBD Plasma-Treated Silicone Rubber

Characteristics of Unipolar Nanosecond Pulse DBD andIts Application on Surface Treatment of Polyimer Films

Comprehensive study on discharge characteristics in pulsed dielectric barrier discharges with atmospheric He and CO2

Influence of Wire Mesh Electrodes on Dielectric Barrier Discharge

Electrical and optical characterization of multi-hollow surface dielectric barrier discharge in configuration with the air-exposed electrode

Numerical Investigation on the Effect of Electrical Parameters on the Discharge Characteristics of NS-SDBD

Ultradeep, low-damage dry etching of SiC

Experimental research of diffuse bi-directional pulsed dielectric barrier discharge plasma