A Low-cost and Highly Efficient method for Fabricating Microlens Arrays

Fan Xiqiu,Zhang Honghai,Gan Zhiyin,Liu Sheng

DOI: https://doi.org/10.3321/j.issn:1003-8728.2006.09.013

2006-01-01

Abstract:Conventionally,microlens arrays are fabricated by multi-photolithography and etching steps,which is not only time-consuming but also prone to make large fabrication errors.This paper presents a novel method for fabricating microlens arrays by hot embossing on silicon substrates.Firstly,diffractive microlens arrays are fabricated by using self-made hot embossing equipment.Secondly,the technical parameters such as temperature and pressure that affect embossing accuracy are discussed.Finally,their profiles and some optical performances are tested and measured.The test results indicate that their replication error is less than 10% and that their diffractive efficiency exceeds 90%.This demonstrates hot embossing is a low-cost and highly efficient method for fabricating microlens arrays.