Initial Stages of Cubic GaN Growth on the GaAs(001) Surface Studied by Scanning Tunneling Microscopy

Qi-Kun Xue,Qi-Zhen Xue,Yukio Hasegawa,Ignatius S. T. Tsong,Toshio Sakurai
DOI: https://doi.org/10.1143/JJAP.36.L1486
1997-01-01
Abstract:Nitridation of the GaAs(001) surfaces using an N-atom radio-frequency plasma source is investigated by in situ scanning tunneling microscopy (STM). Atomically fiat (3 x 3) nitrided surfaces commensurate and coherent with the substrate have been achieved on the As-rich (2 x 4) and (2 x 6) surfaces. Nitridation proceeds via competing mechanisms of (3 x 3) ordering and step-etching caused by the N-atoms. The former simply involves N-As exchange, which does not require significant morphology modification, whereas the latter causes the roughening of the substrate under the standard GaN growth conditions, On the Ga-rich surface. the GaN islands immediately form at the step-edges, suggesting the possibility of self-assembled nanostructures of GaN.
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