The rate-limiting step in the thermal oxidation of silicon carbide

Junjie Wang,Litong Zhang,Qingfeng Zeng,Gérard L. Vignoles,Laifei Cheng,Alain Guette
DOI: https://doi.org/10.1016/j.scriptamat.2010.01.017
IF: 6.302
2010-01-01
Scripta Materialia
Abstract:Using first-principles density-functional calculations of the total energy, we performed a systematic study of the diffusion activation energies of O-2 and CO in SiO2 and Si1-xCxO2. Our results suggest that the dense Si1-xCxO2 (e.g., Si2CO6) layer may play a critical role in the SiC thermal oxidation process. The out-diffusion of CO through SiO2 or Si2CO6 is the controlling step of the SiC thermal oxidation. Known experimental data are explained well by our results. (C) 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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