Research on Biosensor Based on Porous Silicon Optical Microcavity

Yong ZHANG,Xiao-yi LV,Hong-yan ZHANG,Zhen-hong JIA
DOI: https://doi.org/10.3969/j.issn.1000-2839.2012.02.011
2012-01-01
Abstract:In this paper,a kind of microcavity structure of porous silicon is prepared through the method of electrochemical etching and then it was treated by thermal oxidation;the experiment measures the reflectance spectrometry of biological molecules before and after they enter the microcavity structure of one-dimensional porous silicon;meanwhile, the calculated reflectivity spectra of the biosensor were studied contrastively before and after attachment of small molecules.The research result shows mat the porous silicon microcavity biosensor has the characteristics of high sensitivity and specificity,short monitoring period,high accuracy and label-free.The results of this study will help guide practical design of silicon-based photonic microcavity biosensor.
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