Abstract:The silicon-based materials,such as silicon nitride,silicon carbide and silicon oxide etc,have been studied extensively both for their optical and electric characteristics.Especially,the luminescent be-haviors have been attracting much attention in order to develop Si-based light emitting diodes and even laser.Recently,strong blue to red light emission have been observed in amorphous silicon nitride in some reports.Also the photoluminescence and electroluminescence of silicon oxide have been realized and the silicon-based optical gain was also demonstrated.In this report,the optical characteristics of a series of amorphous silicon carbide films with different ratio of carbon to silicon have been studied.The ratio is controlled by changing the gas ratio(R)of methane to silane from 2 to 15,which resulted in different bonding configurations,microstructures and different optical characteristics,such as luminescence behavior and refraction index.Photoluminescence excited by Ar+ 488 nm laser and by the continuous wavelength xenon lamp,FTIR and Raman scattering have been used to analyze and explain the character and the micro structure of the films.It was found that the strong luminescence can be observed for samples deposited at R10.The luminescence peak and intensity was obviously changed after step by step steady-furnace-annealing from 400 ℃ to 800 ℃.The Gaussian-simulation indicated that two luminescence bands appear in all the spectra for the samples annealed at the different temperatures and their intensities were changed with the annealing temperature.This illustrated the transformation of the microstructure of the films at different annealing temperatures.The luminescence can be related to the radiative recombination of the electron-holes in the localized tail states which are excited in the extended states.The blue light emission can be found for samples deposited at R10 and the luminescence intensity was enhanced after post-annealing under UV light excitation.Based on the optical properties of a-SiC films,all a-SiC film based optical microcavities were designed and prepared by controlling the thickness and composition of a-SiC films.The resonant enhancement of luminescence band at 650 nm was achieved and the luminescence band was significantly narrowed.The modulation effect due to the existence of micro-cavity was demonstrated.The present results revealed the possibility to realize the solid state microcavity light emitting diodes.

Studies on the Microstructure, Optical and Electrical Properties of Organic Microcavity Devices Based on a Porous Silicon Reflector

Optical Properties of Unsymmetrical Metal Microcavity in Organic Luminescent Devices

Enhanced Chromaticity of Organic Electroluminescence from Silicon-Based Organic Microcavity

Optical trait of unsymmetrical metal microcavity in organic thin film luminescent devices

Light Emitting Devices Based on Nanocrystalline-Silicon Multilayer Structure

Microcavity of Organic Semiconductor

Periodic Organic–Inorganic Halide Perovskite Microplatelet Arrays on Silicon Substrates for Room‐Temperature Lasing

Improving Performance of Si/CdS Micro-/Nanoribbon P-N Heterojunction Light Emitting Diodes by Trenched Structure

Study on Microcavity Organic Light-emitting Devices Containing Negative Refractive Index Dielectric Layer

Narrow-band Polarized Light Emission from Organic Microcavity Fabricated by Sol-Gel Technique

Photoluminescence studies of porous silicon microcavities

The Influence of Microstructure on Optical Properties of Porous Silicon

Photoluminescence, Composition and Microstructure of Porous Silicon Prepared by Different Substrates

Study of Photoconductivity and Photoluminescence of Organic/porous Silicon Complexes

Sensitized Electroluminescence from Erbium Doped Silicon Rich Oxynitride Light Emitting Devices

Microstructured Organic Cavities with High‐Reflective Flat Reflectors Fabricated by Using a Nanoimprint‐Bonding Process

Flat Layered Structure and Improved Photoluminescence Emission from Porous Silicon Microcavities Formed by Pulsed Anodic Etching

Preparation and Luminescence of Amorphous SiC Material and Its Optical Microcavity

High-efficiency Red Phosphorescent Organic Light-Emitting Diodes Based on Metal-Microcavity Structure

Microstructured organic cavities with high-reflective flat reflectors fabricated by using a nanoimprint-bonding process

Narrow-Line Light Emission from Porous Silicon Multilayers and Microcavities