Non-Columnar Grained Microstructure In Ferroelectric Pzt Thin Films Via Concentration Graded Csd

NINGXIN ZHANG,YI YANG,TIANLING REN,LITIAN LIU
DOI: https://doi.org/10.1080/10584580600659761
2006-01-01
Integrated Ferroelectrics
Abstract:A new kind of PZT film with non-columnar grained structure was prepared by chemical solution deposition, where PZT layers with increasing and decreasing precursors' concentration were deposited layer by layer. XRD analysis revealed the formation of perovskite phase in both thin films. However, C-V curves and P-E loops reflected different dielectric and ferroelectric properties. Different microstructures were observed in the upper part and lower part of the as prepared thin films during TEM investigation, which was attributed to different mechanisms of grain nucleation and growth process due to varied precursor concentration.
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