Growth of LiNbO3 Optical Waveguide Films by Excimer Laser Ablation

JM LIU,ZG LIU,SN ZHU,ZC WU
DOI: https://doi.org/10.1016/0167-577x(94)90144-9
IF: 3
1994-01-01
Materials Letters
Abstract:Waveguiding LiNbO3 films were prepared on sapphire substrates by excimer laser ablation. The as-grown films were characterized by XRD and SEM techniques, which revealed that epitaxial c-oriented and a-oriented LiNbO3 films were achieved on (001) and (012) sapphire substrates, respectively. The optical waveguiding properties were demonstrated by measuring the TM and TE modes.
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