Epitaxial Growth of Optical LiTaO 3 and LiNbO 3 Waveguide Film by Pulsed-Laser Deposition

JM LIU,ZG LIU,SN ZHU,ZC WU,MS ZHANG,D FENG
DOI: https://doi.org/10.1117/12.190783
1994-01-01
Abstract:The waveguiding epitaxial LiTaO3 and LiNbO3 films have been prepared on sapphire substrates by pulsed laser deposition technique. The as-grown films were characterized by Raman scattering, XRD and SEM techniques, which revealed that epitaxial LiTaO3 and LiNbO3 films with small roughness were achieved on (001) and (012) sapphire substrates, respectively. Optical waveguiding properties were demonstrated by m-line measurement of TM and TE modes.
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