Abstract:Lithium niobate (LiNbO3) thin film is an important material for optical waveguide. Recently, particular attention has been paid to the application of LiNbO3 (LN) thin films. To develop and fabricate integrated optical devices, the growth of thin LN epitaxial films onto silicon substrate is of great importance and particularly attractive. In this paper, LN thin film was grown by pulsed laser deposition (PLD). Stoichiometric LN ceramic is used as a target. Amorphous SiO2 buffer layer was coated on Si (100) wafer by in-situ themal oxidation before the deposition. The optimized condition of growing LN film on Si (100) by PLD is found: O2 pressure 30 Pa, substrate temperature 600°C. Only (006) reflection of LN was observed besides the (002) reflection of silicon substrate from XRD pattern. The FWHM (~0.21°) of (006) reflection peak is much narrower than the value reported by Lee [1]. The results of XRD measurement indicate that the LN film was epitaxially grown along the c-axis. Transmission electron microcopy (TEM) patterns confirm that the film has superior crystalline quality. The optical waveguiding properties of the films were demonstrated by a prism coupler method. Fully c-oriented thin film could be grown on silicon substrate by PLD without the buffer layer and the induced electric field.

Pulsed Laser Deposition of Linbo3/Litao3 Multilayer Films on Sio2/Si(100) Substrate

Pulsed laser deposition of c-orientedLiNbO3LiTaO3 optical waveguiding bilayered films on silicon wafers

Pulsed Laser Deposition of C-Oriented Optical Waveguiding Bilayered Films on Silicon Wafers

Pulsed-Laser Deposition and Optical Properties of Completely (001) Textured Optical Waveguiding Linbo3 Films Upon Sio2/Si Substrates

Pulsed Laser Deposition of Optical Waveguiding LiNbO 3 Films on SiO 2 Substrate

(012) Textured LiNbO3 Waveguiding Films Grown on SiO2 by Pulsed Laser Deposition Technique

Pulsed Laser Deposition of (001) Textured LiNbO3 Films on Al2O3/SiO2/Si Substrate

The role of SiO2 buffer layer in the growth of highly textured LiNbO3 thin film upon SiO2/Si by pulsed laser deposition

Epitaxial Growth of Optical LiTaO 3 and LiNbO 3 Waveguide Film by Pulsed-Laser Deposition

Growth and Optical Properties of Completely C-Axis Orientated LiNbO3 Films Deposited by Pulsed Laser Deposition

Highly C-Axis Oriented LiNbO3 Thin Film Grown on SiO2/Si Substrates by Pulsed Laser Deposition

Photoluminescence from Optical Waveguiding Linbo3 Film Formed on Crystalline Sio2 Substrate by Pulsed Laser Deposition

In-situ Poling of Lithium Niobate Films on Silicon Wafer by Applying a Low Electric Field During Pulsed Laser Deposition

Growth of Highly Oriented LiTaO3 Thin Film on Si with Amorphous SiO2 Buffer Layer by Pulsed Laser Deposition

Pulsed-Laser Deposition and Characterization of Optical Wave-Guiding (Pb,la)(zr,ti)o-3 Thin-Films

Pulsed Laser Deposition of /mgo Bilayered Films on Si Wafer in Waveguide Form

Growth of textured LiNbO3 thin film on Si (111) substrate by pulsed laser deposition

Microstructure of LiNbO3 Thin Films Grown on Silicon Substrates by Pulsed Laser Deposition

Nonlinear Optical LiNbO3 Films Grown on Α-Sio2 and Α-Al2o3 in Waveguiding Form

Highly C-axis oriented LiNbO3 thin film on amorphous SiO2 buffer layer and its growth mechanism

GROWTH AND CHARACTERIZATION OF C-ORIENTED LiNbO3 THIN FILMS ON Si (100) BY PLD