Abstract:BaTiO3 crystal film has the very high electro-optic effect, so it has important research value for thin film waveguide electro-optic modulators. In this work, BPM software is used to simulate the single-mode condition of ridge waveguide at first, then BaTiO3 film waveguide structure is designed with suitable film thickness.BaTiO3 waveguide thin films are grown by pulsed laser deposition on single crystal MgO substrate. The BaTiO3 thin-film crystalline structures grown at different temperature sand different laser powers were analyzed by using X ray diffraction , which showed the BaTiO3 films have a priority crystallization direction and good crystallization quality at 750°C grown temperature. For the optimally-designed waveguide structures, the PECVD technique and ICP plasma etching method are employed to coat and etch Si3N4 films, respectively. Through the optimization of main process parameters, 60 sccm reaction gas flow and 150 nm/min etching speed are finally selected to create the ridge waveguides, and consequently, the surface roughness of Si3N4 film waveguide reaches 2.3 nm.

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Preparation of optical Ba2NaNb5O15 waveguide films by pulsed laser deposition

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Excimer laser ablation of Ba2NaNb5O15 optical waveguide films on MgO(001) substrates

Epitaxial BaTiO3 Thin Films on Different Substrates for Optical Waveguide Applications

Pulsed Laser Deposition of Optical Waveguiding LiNbO 3 Films on SiO 2 Substrate

Growth of LiNbO3 Optical Waveguide Films by Excimer Laser Ablation

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Pulsed Laser Deposition of C-Oriented Optical Waveguiding Bilayered Films on Silicon Wafers

Study of Optical Waveguide of Barium Sodium Niobate Films on Potassium Titanyl Phosphate

BaTiO 3 Waveguides on MgO Buffered-Sapphire Single Crystals

Fabrication and Optical Characterization of Pb(Mg1/3Nb2/3)O3-PbTiO3 Planar Thin Film Optical Waveguides