Abstract:BaTiO3 crystal film has the very high electro-optic effect, so it has important research value for thin film waveguide electro-optic modulators. In this work, BPM software is used to simulate the single-mode condition of ridge waveguide at first, then BaTiO3 film waveguide structure is designed with suitable film thickness.BaTiO3 waveguide thin films are grown by pulsed laser deposition on single crystal MgO substrate. The BaTiO3 thin-film crystalline structures grown at different temperature sand different laser powers were analyzed by using X ray diffraction , which showed the BaTiO3 films have a priority crystallization direction and good crystallization quality at 750°C grown temperature. For the optimally-designed waveguide structures, the PECVD technique and ICP plasma etching method are employed to coat and etch Si3N4 films, respectively. Through the optimization of main process parameters, 60 sccm reaction gas flow and 150 nm/min etching speed are finally selected to create the ridge waveguides, and consequently, the surface roughness of Si3N4 film waveguide reaches 2.3 nm.

Excimer Laser Ablating Preparation of Ba 2 NaNb 5 O 15 Thin Films on KTiOPO 4 Substrate and Its Guide Wave Property

Excimer Laser Ablating Preparation of Ba2NaNb5O15 Optical Waveguiding Films on (001) KTiOP04 Substrates

Excimer-Laser Ablating Preparation Of Ba2nanb5o15 Optical Wave-Guiding Films On (001)Ktiopo4 Substrates

Preparation of optical Ba2NaNb5O15 waveguide films by pulsed laser deposition

Epitaxial Ba2nanb5o15 Thin-Film by Pulsed-Laser Deposition and Its Wave-Guide Properties

Epitaxial Growth of Optical Ba2NaNb5O15 Waveguide Film by Pulsed Laser Deposition

Excimer laser ablation of Ba2NaNb5O15 optical waveguide films on MgO(001) substrates

Growth of LiNbO3 Optical Waveguide Films by Excimer Laser Ablation

Investigation on and preparation of the barium sodium niobate optical-waveguide films by pulsed laser deposition (PLD) technique

Excimer Laser Ablation of (001) Textured Zno Waveguiding Films on Fused Silica

Study of Optical Waveguide of Barium Sodium Niobate Films on Potassium Titanyl Phosphate

BaTiO3 Film Optical-Waveguide Prepared by Pulsed Laser Deposition

Epitaxial-Growth of Optical Wave-Guiding Litao3 Films by Excimer-Laser Ablation

(012) Textured LiNbO3 Waveguiding Films Grown on SiO2 by Pulsed Laser Deposition Technique

Epitaxial BaTiO3 Thin Films on Different Substrates for Optical Waveguide Applications

Design and Fabrication of BaTiO<sub>3</sub> Crystal Thin-Film Waveguides

'Non-Critical' Phase-Matching in Nonlinear Ba2NaNb5O15/KTiOPO4film Waveguides Grown by Epitaxial Methods

Epitaxial Growth of Optical LiTaO 3 and LiNbO 3 Waveguide Film by Pulsed-Laser Deposition

Electrophoretic Deposition and Photoluminescent Properties of Eu-doped BaTiO3thin Film from a Suspension of Monodispersed Nanocrystallites

Pulsed-Laser Deposition and Characterization of Optical Wave-Guiding (Pb,la)(zr,ti)o-3 Thin-Films

Waveguide structure of Er-doped KTiOPO4 films on different substrates by pulsed-laser deposition