Visible-Blind Metal-Semiconductor-Metal Photodetectors Based on Undoped AlGaN/GaN High Electron Mobility Transistor Structure

Hao Jiang,Takashi Egawa,Hiroyasu Ishikawa,Chunlin Shao,Takashi Jimbo
DOI: https://doi.org/10.1143/JJAP.43.L683
2004-01-01
Abstract:Visible-blind Schottky metal-semiconductor-metalphotodetectors (MSM-PDs) fabricated on an undoped AlGaN/GaN high electron mobility transistor (HEMT) structure were reported. Dark-current density as low as 1.8 x 10(-8) A/cm(2) at 10 V bias was obtained. A peak responsivity of 114 mA/W at 350nm was measured under top illumination with a constant irradiation power density of 10 muW/cm(2), which corresponds to an external quantum efficiency of 40%. The MSM-PDs based on this structure are of advantage for monolithic integration with HEMT circuits in one epitaxial step.
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