Ga2O3 Metal–insulator-Semiconductor Solar-Blind Photodiodes with Plasmon-Enhanced Responsivity and Suppressed Internal Photoemission

Chong-De Zhang,Fang-Fang Ren,Mingbin Yu,Baoshan Zhang,Shulin Gu,Rong Zhang,Youdou Zheng,Jiandong Ye
DOI: https://doi.org/10.1088/1361-6463/acb36a
2023-01-01
Abstract:Metal-semiconductor-metal (MSM) architectures are popular for achieving high-responsivity Ga2O3 solar-blind photodetectors (SBPDs), however, the hot-electron-induced internal photoemission (IPE) effect restricts their detecting performance. Herein, we demonstrate the rational design of an Al/Al2O3/Ga2O3 metal-insulator-semiconductor (MIS) SBPD that has merits of enhanced responsivity, suppressed sub-gap response and ultralow dark current based on the simulation results obtained using Lumerical software. For the cylindrical patterned detectors with Al/Al2O3/Ga2O3 MIS structures, the optimized dimensions of Al electrodes with a conformed ultra-thin (2 nm) Al2O3 layer support the surface plasmon polariton resonances at 250 nm, thus improving the photoresponsivity to 74 mA W-1. Furthermore, the sandwiched Al2O3 layer lifts the barrier for hot electrons in electrodes, which significantly suppresses the IPE-induced sub-gap photoresponse by more than 10(5) in magnitude with respect to the Al/Ga2O3 MSM counterpart. Optical and electrical field distributions are overlapped in cylindrically patterned MIS detectors, simultaneously improving the excitation and collection efficiencies of excess carriers and resulting in the 10(3)-boosted rejection ratio.
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