High Performance Solar-Blind Photodetectors Based on Plasma-Enhanced Atomic Layer Deposition of Thin Ga2o3 Films Annealed Under Different Atmosphere

Yu-Chang Chen,Dingbo Chen,Guang Zeng,Xiaoxi Li,Yu-Chun Li,Xue-Feng Zhao,Na Chen,Tingyun Wang,David Wei Zhang,Hong-Liang Lu
DOI: https://doi.org/10.2139/ssrn.4195405
2022-01-01
SSRN Electronic Journal
Abstract:Solar-blind photodetectors (SBPDs) have attracted great interests for the potential applications as missile guidance, biological detection, and ultra-violet imaging. Despite the large number of Ga 2 O 3 -SBPDs reported, most of them with thick light absorption layers fail to achieve both high responsivity and fast response time simultaneously. In this work, high-performance SBPDs with 20 nm thick Ga 2 O 3 film were demonstrated with an extremely low dark current at 0.76 pA, a great photo-dark current ratio of 10 6 , a high responsivity of 6.18 A/W, and an ultra-fast decay time ~45 ms. Moreover, the films annealed in nitrogen exhibit a more pronounced amorphous-to-polycrystalline transition, while the samples after oxygen annealing show a lower recrystallization and less oxygen vacancy concentration. This finding opens up the pathways and provide an alternative strategy towards developing the high photoresponse performance required for future applications using solar-blind detection.
What problem does this paper attempt to address?