High-Performance Metal-Organic Chemical Vapor Deposition Grown $\\varepsilon$ -Ga 2 O 3 Solar-Blind Photodetector With Asymmetric Schottky Electrodes

Yuan Qin,Haiding Sun,Shibing Long,Gary S. Tompa,Tom Salagaj,Hang Dong,Qiming He,Guangzhong Jian,Qi Liu,Hangbing Lv,Ming Liu
DOI: https://doi.org/10.1109/led.2019.2932382
IF: 4.8157
2019-01-01
IEEE Electron Device Letters
Abstract:In this letter we present a high performance $\\varepsilon $ -Ga2O3 solar-blind photodetector (SBPD) with asymmetric Schottky electrodes. The $\\varepsilon $ -Ga2O3 films were heteroepitaxially grown on ${c}$ -plane sapphire by metal-organic chemical vapor deposition (MOCVD). The SBPDs were fabricated in the form of lateral interdigitated Schottky electrodes composed of a Pt/Ti/Au metal stack and a Ti/Au metal stack. The SBPD shows a rectification ratio of ~ 102 with low dark current of 25 pA at ${V} = {6}$ V. A high photo-to-dark-current ratio of ${5.7}\\boldsymbol {\\times }{10}^{{4}}$ under 254 nm light illumination was measured. Furthermore, the SBPD exhibits an ultrahigh detectivity and external quantum efficiency of ${4.2}\\boldsymbol {\\times }{10}^{{14}}$ Jones and ${4.1}\\boldsymbol \\,\\,{\\times }\\,\\,{10}^{{4}}$ %, respectively. Most importantly, the SBPD possesses an ultrahigh responsivity of 84 A/W with a fast response speed of 100 ms, suggesting the promise of $\\varepsilon$ -Ga2O3 in the future photodetector applications.
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