High-Performance Metal-Organic Chemical Vapor Deposition Grown <inline-formula> <tex-math notation="LaTeX">$\varepsilon$ </tex-math></inline-formula>-Ga<sub>2</sub>O<sub>3</sub> Solar-Blind Photodetector With Asymmetric Schottky Electrodes

Yuan Qin,Haiding Sun,Shibing Long,Gary S. Tompa,Tom Salagaj,Hang Dong,Qiming He,Guangzhong Jian,Qi Liu,Hangbing Lv,Ming Liu
DOI: https://doi.org/10.1109/LED.2019.2932382
IF: 4.8157
2019-01-01
IEEE Electron Device Letters
Abstract:In this letter we present a high performance <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\varepsilon $ </tex-math></inline-formula> -Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> solar-blind photodetector (SBPD) with asymmetric Schottky electrodes. The <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\varepsilon $ </tex-math></inline-formula> -Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> films were heteroepitaxially grown on <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${c}$ </tex-math></inline-formula> -plane sapphire by metal-organic chemical vapor deposition (MOCVD). The SBPDs were fabricated in the form of lateral interdigitated Schottky electrodes composed of a Pt/Ti/Au metal stack and a Ti/Au metal stack. The SBPD shows a rectification ratio of ~ 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> with low dark current of 25 pA at <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V} = {6}$ </tex-math></inline-formula> V. A high photo-to-dark-current ratio of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${5.7}\boldsymbol {\times }{10}^{{4}}$ </tex-math></inline-formula> under 254 nm light illumination was measured. Furthermore, the SBPD exhibits an ultrahigh detectivity and external quantum efficiency of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${4.2}\boldsymbol {\times }{10}^{{14}}$ </tex-math></inline-formula> Jones and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${4.1}\boldsymbol \,\,{\times }\,\,{10}^{{4}}$ </tex-math></inline-formula> %, respectively. Most importantly, the SBPD possesses an ultrahigh responsivity of 84 A/W with a fast response speed of 100 ms, suggesting the promise of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\varepsilon$ </tex-math></inline-formula> -Ga <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> in the future photodetector applications.
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